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NEW PRODUCT RELEASE:

February 24, 2005

Manitou Systems announces new Plasma Source

Danbury, CT, February 24, 2005 -- Manitou Systems introduces a new model in the Delta Glow RF plasma source family; the "Delta Glow Integrated" (DGi). The DGi is a complete ICP plasma source + RF power system integrated in a shoebox sized enclosure. It’s compact size enables mounting directly to a plasma process chamber to perform downstream or upstream processes.

High conversion efficiency enables this model to perform processes including:

• Chamber cleaning using reactive gas
• Exhaust gas neutralization/abatement (positioned between the chamber & pump)
• Process gas pre-activation in reactive sputtering environments
• Substrate conditioning in a upstream mode
• Use as a primary downstream plasma source on CVD systems

Delta Glow products also find many applications in developmental laboratories:

·         Providing plasma environments to modify surface properties of plastic substrate surfaces in the manufacture of medical devices

·         Testing of gaseous lamps

·         Modification to powered (nano) materials

Delta Glow integrated models are comprised of Manitou’s field proven building blocks starting with a 13.56MHz 600 watt RF power generator + preset impedance matching network. These sub-systems plus a high-density plasma reactor tube sit on a water chilled aluminum base plate. Access to the plasma reactor section is easily made using industry standard KF-50 seals and flanges. All (analog) user controls are made available through a DB15 connection port.

Various models are available to address the process requirements of reactive and non-reactive processes. OEM versions include specialized vacuum flanges as well as operating control and reporting features.

For More Information Contact:

Steven M. Simons
Manitou Systems, Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786
E-mail: ssimons at manitousys.com

About Manitou Systems:
Manitou Systems is a privately held high technology company founded in 1989 specializing in the area of RF, DC and Microwave power systems & advanced plasma source design, engineering and, manufacturing. The company's products are sold to the semiconductor, flat panel display and industrial marketplace. Located in Danbury, Connecticut, we operate a 12,000 ft2 corporate and manufacturing facility. Manitou Systems markets its products worldwide through direct and independent sales representatives. For more information visit our corporate website: www.manitousys.com

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Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

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