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DELTA
GLOW™ RF PLASMA SOURCES
General Specifications
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Gas
Conversion Efficiency
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>90%
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Source
Circuit Topology
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RF
resonant cavity, inductively coupled
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RF
Power Control
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Forward
power leveling or via real power
(Forward - reflected) leveling
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Impedance
Matching Variable
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Automatic
or manual operation
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Source
Cluster Operation
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Via passive
RF power splitter module
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Operating
Pressure Range
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1
micron to 10 Torr
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Delta Glow Model Specifications
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Specification
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DG-300
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RF input power
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up to 600 Watts
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Operating
frequency
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13.56 MHz
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Cooling
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forced air
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Reactor
tube dimensions
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50 mm
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Gas
input
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1/4"VCR
(VCR to K50 adapter included)
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Vacuum
interface
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KF50
(Optional
adapter fittings are
available
upon request)
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Instructions
for configuring your own DG300 plasma source system
Popular
DG300 Component Packages
Model DG-300 Delta Glow RF Plasma
Sources
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Process Tube &
O-ring Seal Type
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Operating Frequency
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Order #
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Quartz
- KalrezTM O-rings
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13.56 MHz
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05-100000-02
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Quartz - VitonTM O-rings
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13.56 MHz
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05-100000-00
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Alumina
- KalrezTM O-rings
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13.56 MHz
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05-100000-01
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Notes: Viton O-ring seals are
supplied (in all cases) installed on the unit's KF-50 input & output
centering rings. In the event that a fluorine based process is used, the
user must obtain and install KalrezTM
O-ring seals on these centering rings. The O-ring size is 2-330.
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Model DG-300 Accessories
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Accessory
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Order #
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Model Accu-Match ACM1000PI-7/16 automatic
impedance matching network
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00001533
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Model MTK-600-13 manually adjusted
impedance matching network
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03-700000-03
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RF cable — 12 foot
long — connects the PB3-300D RF generator to the matching network
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00002175
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RF cable — Model RF2-NN 12 foot
long — connects the Cesar RF generator to the matching network
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15-136700-20
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Control cable — Model RC - 10’
long — connects the auto tuner to the Helius RF generator
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00800189
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RF output cable — 25" long
- connects the matching network to the Delta Glow plasma source
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04-130041-22
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RF output cable — 18" long
- connects the matching network to the Delta Glow plasma source
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15-700122-02
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50mm quartz process tube
replacement kit
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05-100000-50
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50mm alumina process tube
replacement kit
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05-100000-51
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Model PB3-300D 300 watt 13.56 MHz RF
generator
19"
rack mount, LED digital displays & advanced features
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04-140032-01
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Model PB3-300 300 watt 13.56 MHz RF
generator
Shoebox
enclosure, analog meter & basic features
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04-140031-07
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Helius Model H30013 300 watt 13.56 MHz RF
generator
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00800190
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Helius Model H60013 600 watt 13.56 MHz RF
generator
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00001183
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Manitou
Systems Inc.
18 Commerce Road,
Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786
This
website has been revised as of 03.25.07
Any
technical specification described on this website is subject to change without
prior notice.
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