Manitou Systems Inc.

DELTA GLOW™ Model DG600 RF PLASMA SOURCES

General Specifications

Gas Conversion Efficiency	>90%
Source Circuit Topology	RF resonant cavity, inductively coupled
RF Power Control	Forward power leveling
Impedance Matching Variable	Automatic or manual operation
Source Cluster Operation	Via passive RF power splitter module
Operating Pressure Range	1 micron to 10 Torr

Delta Glow Model Specifications

Specification	DG-600
RF input power	up to 1000 Watts
Operating frequency	13.56 MHz
Cooling	forced air
Reactor tube dimensions	150 mm
Gas input	1/4"VCR (VCR to K50 adapter)
Vacuum interface	KF50 or User specified

Model DG-600 Delta Glow RF Plasma Source

Model	Process Tube Type	Notes	Operating Frequency	Order #
DG-600	Quartz	KF50 Input with 1/4" VCR & NW160 Output	13.56MHz	00001988
DG-600	Quartz	KF50 I/O with 1/4" VCR gas input	13.56MHz	05-100000-60

Model DG-600 Accessories

Accessory	Order #
Model Accu-Match^TM ACM1000PI-7/16 automatically adjusted impedance matching network	00001984
RF cable — Model RF2-NN 12 foot long — connects the Helius RF generator to the matching network	04-130041-08
Quartz process tube replacement kit	05-100000-52
RC cable - 10' long - connects the Accu-Match to the Helius RF generator	00800189
Helius^TM Model H60013 600 watt 13.56 MHz RF generator	00001183

Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

This website has been revised as of 03.25.07

Any technical specification described on this website is subject to change without prior notice.

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