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DELTA GLOW™ Model DG600 RF PLASMA SOURCES

 

  

 

General Specifications

Gas Conversion Efficiency

>90%

Source Circuit Topology

RF resonant cavity, inductively coupled

RF Power Control

Forward power leveling 

Impedance Matching Variable

Automatic or manual operation

Source Cluster Operation

Via passive RF power splitter module

Operating Pressure Range

1 micron to 10 Torr

                   Delta Glow Model Specifications

Specification

DG-600

 RF input power

 up to 1000 Watts

Operating frequency

13.56 MHz

Cooling

forced air

Reactor tube dimensions

150 mm

Gas input

1/4"VCR
(VCR to K50 adapter)

Vacuum interface

KF50 or User specified

Model DG-600 Delta Glow RF Plasma Source

Model

Process Tube Type

Notes

Operating Frequency

Order #

DG-600

Quartz

KF50 Input with 1/4" VCR & NW160 Output

13.56MHz

00001988

DG-600

Quartz

KF50 I/O with 1/4" VCR gas input

13.56MHz

05-100000-60

Model DG-600 Accessories

Accessory

Order #

Model Accu-MatchTM ACM1000PI-7/16 automatically adjusted impedance matching network

00001984

RF cable — Model RF2-NN 12 foot long — connects the Helius RF generator to the matching network

04-130041-08

Quartz process tube replacement kit

05-100000-52

RC cable - 10' long - connects the Accu-Match to the Helius RF generator

00800189

HeliusTM Model H60013 600 watt 13.56 MHz RF generator

00001183

 


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Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

 

This website has been revised as of 03.25.07

 

Any technical specification described on this website is subject to change without prior notice.

 

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