Manitou Systems Inc.

DELTA GLOW™ INTEGRATED RF PLASMA SOURCES

The Delta Glow integrated plasma source is a new addition to our family. This model includes a complete 600 watt 13.56MHz RF power system, manually adjustable impedance match and an ICP type plasma reactor tube. Designed to be installed directly on the process chamber, this plasma source can be configured for either upstream or downstream processes. All controls are remoted through the use of an analog I/O port.

The DGi is the most flexible plasma source on the market enabling the user to perform complex plasma processes including vacuum chamber clean, abatement, ashing, oxidation and surface modifications. It's physical design enables it to be mounted either above or below the process chamber for upstream or downstream processes. In some applications a linear substrate is moved through the plasma reactor tube.

All RF power components are field proven as they are employed in the Manitou Systems line of RF power generators and impedance matching networks.

DGi Specifications
Gas Conversion Efficiency	>90%
Source Circuit Topology	ICP (coil over dielectric tube), inductively coupled
RF Power System	13.56MHz 600 Watts continuous duty
RF Power Control	Forward power leveling
RF Impedance Matching	Manually adjusted - Separate Load & Tune adjustments
Water Cooling (base plate)	1/4" Swagelok fittings
Air cooling (enclosure)	Via user's house exhaust or through external forced air source.
Process Gas Fitting	1/4" VCR (edge connection) and/or KF50 (end connection)
Vacuum Chamber Interface	KF50
Plasma Reactor Tube Dimensions	50mm diameter - quartz (or optional alumina)
Operating Pressure Range	1 micron to 10 Torr
Process Gas Types	Ar, NF₃, O₂, H₂, N₂, Freon + others based on pressure and mixture
Control Interface	DB-15 with opto-isolated I/O
Inputs	Output Setpoint, Output ON, Interlock
Outputs	RF Output ON, Temp Fault, Exhaust Fault, Plasma Sensor, Fwd RF Power, Reflected RF Power
AC Mains Input	187>240VAC 50/60Hz Single Phase
Helium leak specification	This unit is tested and will not exceed a leak rate of 10^-8 standard cc/sec.
Physical size	14.5" L x 9.5" W x 6" H
Weight (shipping)	35 lbs (kg)

Delta Glow Integrated 19" Controller Module

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Model	Process Tube Type	Order #
*Delta Glow integrated^TM*	Quartz	00003100
*Delta Glow integrated^TM*	Alumina	00003241

Delta Glow integrated Accessories

Accessory	Order #
50mm quartz process tube replacement kit	00003242
50mm alumina process tube replacement kit	00003243
Digital meter handheld remote analog control with 10' cable	00003355

Whitepaper

Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

This website has been revised as of 03.25.07

Any technical specification described on this website is subject to change without prior notice.

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