Instructions for configuring your own RF power delivery system for use with magnetron cathode sputtering sources

RF Generator + Impedance matching network + Match control cable +                                       RF interconnect cable + RF output cable (to plasma)

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This tutorial is designed to enable the purchaser to order the proper component set that makes up a typical RF delivery system. Refer to each component's data sheet or web page for detailed product information. 

                        Upon request, Manitou will issue a "Package or Set" part number for use by customers and distributors to order specifically defined component sets.

Helius RF Power Generator + Accu-Match automatic or MTK manual matching networks

This section defines systems using the full featured Helius 13.56MHz RF generator and either an automatic or manually operated impedance matching network + the necessary interconnect cables (between the RF generator and the matching network). The customer will also need to purchase a coaxial output cable to connect the impedance match output to the plasma (typically a magnetron sputtering cathode).

First (1), please select the desired RF output power level model Helius;

• Helius H30013   300 watts RF output    PN 00800190

• Helius H60013   600 watts RF output    PN 00001183

• Helius H1K13    1000 watts RF output   PN 00800191

Second (2), please select the desired impedance matching network model;

• ACM600L-7/16-L-VC/Air    for use with 300 & 600 watt generators    PN 00001521

• ACM1000L-7/16-L-VC       for use with 1000 watt generators            PN 00800188

• MTK600-13-L-HNF-Air       for use with 300 watt generators              PN 00003484

• MTK1000-13-L-7/16-VC/Air  for use with 600 & 1000 watt generators PN 00003464

Third (3), please select the Match Control Cable interconnect cable (for use with ACM models only);

• DB25 Cable - Male to Male, 10' long,                                      PN 00001638

Fourth (4), please select the RF Coaxial interconnect cable (between the RF gen. & match);

• RF coaxial cable - 12' long, Type N female connectors on both ends, Type RG213 cable for use with Helius models listed above                                             PN 04-130041-08

Fifth (5), please select the RF output cable (from match output to plasma). These cables are typically 1.5' to 3.0' in length and made from Type RG393 Teflon coax and straight (in-line) connectors. Contact the factory for special length cables, materials and connector types;

For use with MTK600 impedance matching networks:

• HN male to HN male, 18" long                                              PN 15-700122-36

• HN male to HN male, 24" long                                              PN 00003488

• HN male to HN male, 36" long                                              PN 15-700124-76

• HN male to N male, 18" long                                                PN 04-130041-11

• HN male to N male, 36" long                                                PN 15-700125-50

• HN male to un-terminated end, 36" long                                PN 15-700123-10

For use with MTK1000, ACM600 & ACM1000 impedance matching networks:

• 7/16 male to HN male, 18" long                                              PN 15-700122-02

• 7/16 male to HN male, 24" long                                              PN 00002458

• 7/16 male to HN male, 36" long                                              PN 00003487

• 7/16 male to N male, 18" long                                                PN 00003485

• 7/16 male to N male, 36" long                                                PN 00001838

• 7/16 male to N male, 24" long                                                PN 00800135

• 7/16 male to un-terminated end, 36" long                                PN 00003486

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PB3 RF Power Generator + External MTK manual matching networks

to be continued.....

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Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

This website has been revised as of 03.25.07

Any technical specification described on this website is subject to change without prior notice.

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