Accu-Match^TM  

AUTOMATIC IMPEDANCE MATCHING NETWORKS

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The Accu-Match™ series of impedance matching networks is optimized to provide fast, reliable and robust matching capability under the most severe process conditions, within power ranges up to 15 KW. Accu-Match™ matching networks use high quality variable capacitors to ensure long life and minimize downtime on all plasma processes.

All models include forced air cooling with water cooling on most higher power units. The series inductor as well as the ends of the capacitors are cooled to ensure stable operation during high power operation.

Technical Specifications
Input impedance: 50 ohms resistive
Operating Frequency:13.56 MHz  (up to 50 MHz upon request)
Plasma resistive matching capability: typically 0.60-30 ohms
Plasma reactive matching capability: typically 0-150
DC bias display: 0-4 KV DC
Cooling water needed on some models
AC mains: 90-240 VAC 50/60 Hz single phasing 80VA connector via IEC connec (HP) type receptacle and power cord.
Control interface: DB-25 female connector

Enclosure size: 14.75" long X 9.5" wide X 6" tall

The image to the right illustrates the typical plasma tuning range for our Models ACM600 and ACM1000. The actual tuning range may be adjusted by modifying the inductance value (switching taps on the coil) and by adding additional, fixed capacitance in parallel with the delivered variable capacitors.

Measuring Your Chamber Impedance

Installation
The impedance matching network specification and installation is key to proper operation of the RF system. Although the majority of these units are installed and operated without assistance from the manufacturer, the customer is encouraged to purchase on-site engineering startup assistance during commissioning. Daily rates are available upon request from Manitou.

All models are fully self-contained and will automatically operate without any connection to a remote control panel, analog user interface, or Helius control panel. However, to manually adjust and monitor the unit’s operation, the user will need to use some form of external display/control such as our mode HHC hand held controller.

All models operate on 100-240 VAC 50/60 Hz AC Mains input. All models (unless specified) are capable of operation with 13 - 45 MHz RF power generators. Please note however, that the RF matching circuitry (variable capacitors & series inductor) may need to be selected for operation at or above the 13.56 MHz band.

Models that operate at or below 1500 watts include a tap adjustable series inductor. Higher power units include fixed turn inductors, which will require replacements (of alternate number of turns) during the initial setup. These replacement inductors are available upon request.

RF output connections to the plasma load are made via coaxial connectors or high current "Multi Contact" connectors. Mating Multicon connectors are supplied with each unit. All water-cooled models use SAE dimension fittings. 

The image to the left shows the "plasma" output end of the Accu-Match module. This model includes a type 7/16 DIN female connector. Two 1/4-20 bronze screws are also included for securing the ground connection.

Complementary RF & Control cables are available upon request separately.

Typical high quality vacuum variable capacitors used in the Accu-Match products

Call Now to Place Your Order

Call 203.270.8797 to speak with a Manitou engineer about your application, or send us an e-mail. We’ll help you select the right model for your application.

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Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

This website has been revised as of 03.25.07

Any technical specification described on this website is subject to change without prior notice.

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