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RF POWER PRODUCT LITERATURE |
PLASMA SYSTEM PRODUCT
LITERATURE |
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HeliusTM RF
Generators |
PDF |
Series PB3
Table Top Magnetron Sputtering & Plasma
Systems |
PDF |
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PB Integrated RF Generators
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PDF |
PLASMA SOURCE PRODUCT
LITERATURE |
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Accu-MatchTM
Impedance Matching Networks |
PDF |
Delta GlowTM
High Energy Plasma Source |
PDF |
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MTK Manual Impedance Matching Networks
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PDF
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Delta GlowTM Application
Worksheet |
PDF |
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High Power RF
Transmission Cables (Matching Network to Plasma) |
PDF |
Delta Glow IntegratedTM Plasma
Source |
PDF |
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ATK Handheld Matching
Network Controller |
PDF |
APPLICATION NOTES |
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Switch Modules
for High Power RF & DC |
PDF |
Filters - 13.56MHz
RF Filters for use with Resistive Heaters |
PDF |
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RF Filter Modules |
PDF |
Cables - Using Long Coaxial Cables To Connect The
Impedance Matching Network Output To A Plasma Load |
PDF |
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Vacuum System
Grounding |
PDF |
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Delta GlowTM
High Energy Plasma Source Applications |
PDF |
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Delta GlowTM
Trial Data Worksheet (Excel format) |
XLS |
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PB3 Plasma Impedance Matching Problems &
Solutions |
PDF |
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PB3 RF System - Installation of additional
series inductance in the matching network section |
PDF |
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PB3 RF System - Installation of additional
fixed shunt capacitors |
PDF |
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PB3 - Converting
the internal Impedance Matching Network from "L" >
"PI" |
PDF |
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RF Power
System Worksheet Useful
information for selecting the proper plasma power system components
& accessories |
PDF |
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COMPANY
INFORMATION |
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Corporate Brochure |
PDF |
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INSTALLATION
DRAWINGS & SCHEMATICS |
Terms & Conditions |
PDF |
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Delta GlowTM
Model DG300 Installation Drawing |
PDF |
WHITE PAPERS |
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Delta GlowTM
Model DG80 Installation Drawing |
PDF |
Delta Glow Presentation @ Society of Vacuum
Coaters 1999 |
PDF |
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Remote RF/DC Switch
Module Installation Drawing |
PDF |
Delta Glow Poster Paper @ Society of Vacuum
Coaters 2002 |
PDF |
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Vacuum System Heater RF
Filter Module
|
PDF |
HeliusTM & Accu-MatchTM
Presentation @ Society of Vacuum
Coaters 2003 |
PDF |
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Series MTK Installation Drawing
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PDF |
Presentation
on IGBT Based HV Power Supply Designs
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PDF
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Remote RF/DC 2 Cathode Switch Module
Schematic PN 00001134-S
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PDF |
PRODUCT MANUALS
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PB3-MD Integrated RF Generators (Digital
Display)
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PDF
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Delta Glow DG80 80mm Bolt Vacuum Interface
Flange
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PDF |
PB3-M Integrated
RF Generators (Analog
Display)
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PDF
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Remote RF 3 Cathode Switch Module
Schematic PN 15-800002-63-S
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PDF
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MTK Manual Impedance Matching Network
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PDF
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Helius Analog Interface Schematic and Typical
Applications
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PDF
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Delta GlowTM DG-80 High Energy
Plasma Source
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PDF
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Delta GlowTM DG-300 High Energy
Plasma Source
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PDF
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Delta GlowTM Integrated DGi High Energy
Plasma Source
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PDF
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HeliusTM RF Generator
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PDF
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Accu-MatchTM Impedance Matching
Network
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PDF
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Eliminator Filter Module Products
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PDF
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