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HELIUSTM Series HVT 1.5K RF GENERATORS

The Helius line of RF Generators offer ruggedness and extremely high reliability into High VSWR applications. These fixed frequency, hybrid RF generators are designed for the most demanding industrial, scientific and commercial applications such as plasma processes for manufacturing of semiconductors, flat panel displays and, magnetic media. The Helius can also power scientific research projects and industrial lasers.

All Helius HVT products are manufactured to order using standard components. 

General Specifications

  • Available frequency range: 10MHz to 500 MHz.
  • Maximum frequency bandwidth is +/- 2% of center frequency 
  • Maximum RF output power rating: 
    • 10MHz to 40MHz 2000 watts
    • 40MHz to 250MHz 1500 watts
    • 250MHz to 500MHz 1100 watts  
  • Pulsed RF output capable
  • 208/240 VAC 60 Hz AC Mains. (Optional AC mains input voltage frequencies are available as an option). 
  • All models include a 6' AC mains line cord, the customer is responsible for furnishing the supply side connector.
  • RF output impedance is 50 ohms resistive.
  • Enclosed, tabletop cabinet measuring 19.25" wide X 24" deep X 24" tall
  • Forced air cooling, supply air enters through two front panel filters and exits through the cabinet's roof.
  • All external control connections are mounted on the rear panel

All HVT models include the Helius RF exciter/control module, a vacuum tube high power amplifier and high voltage power module. The high power amplifier is mounted behind a removable blank front panel as it only requires periodic adjustment. All user controls and graphical display are accessible via the Helius front panel.

                  

RF Power Section

The operating frequency is determined by a clock oscillator. This signal is buffered and amplified ultimately driving a pair of solid state RF power modules to obtain a minimum drive power of 50 watts. An internal switch mode power supply provides the necessary DC power. An internal reflected power monitor enables monitoring (during maintenance) of the inter-stage impedance matching.

The low level drive power is then connected to the input of the high power amplifier. The high power amplifier module is configured with parallel Eimac-CPI power tubes providing the rated output power. A transformer based HV power module provides the necessary high voltage DC power. A dual direction RF power coupler provides feedback to the microprocessor controller for front panel display and control.  

The RF output impedance is 50 ohms resistive and will require the use of a proper impedance matching device to ensure proper and safe operation powering typical reactive (plasma process) loads. 

Helius Controller

A microprocessor based controller enables the user to operate the unit from the front panel or from a host computer. Analog and RS232 interfaces are provided.

Interface Connections

  • RF Output
    • 10 to 250MHz - Type N female
    • 10 to 40MHz high power - Type 7/16 DIN female
    • 250 to 500MHz - Type SC female
  • External Interlock - 4 position AMP CPC
  • External analog control - Type DB25
  • External RS232 control - Type DB9

Download HVT1.5K Data Sheet

Download HVT1.5K Manual (Preliminary as of 7/05)


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Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

 

This website has been revised as of 03.25.07

 

Any technical specification described on this website is subject to change without prior notice.

 

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All Rights Reserved 2007, Manitou Systems, Inc. 18 Commerce Road, Newtown, CT. 06470