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HELIUSTM Series HVT 1.5K RF GENERATORS
The Helius line of RF Generators offer ruggedness and extremely high reliability into High VSWR applications. These fixed frequency, hybrid RF generators are designed for the most demanding industrial, scientific and commercial applications such as plasma processes for manufacturing of semiconductors, flat panel displays and, magnetic media. The Helius can also power scientific research projects and industrial lasers. All Helius HVT products are manufactured to order using standard components. General Specifications
All HVT models include the Helius RF exciter/control module, a vacuum tube high power amplifier and high voltage power module. The high power amplifier is mounted behind a removable blank front panel as it only requires periodic adjustment. All user controls and graphical display are accessible via the Helius front panel.
RF Power Section The operating frequency is determined by a clock oscillator. This signal is buffered and amplified ultimately driving a pair of solid state RF power modules to obtain a minimum drive power of 50 watts. An internal switch mode power supply provides the necessary DC power. An internal reflected power monitor enables monitoring (during maintenance) of the inter-stage impedance matching. The low level drive power is then connected to the input of the high power amplifier. The high power amplifier module is configured with parallel Eimac-CPI power tubes providing the rated output power. A transformer based HV power module provides the necessary high voltage DC power. A dual direction RF power coupler provides feedback to the microprocessor controller for front panel display and control. The RF output impedance is 50 ohms resistive and will require the use of a proper impedance matching device to ensure proper and safe operation powering typical reactive (plasma process) loads. Helius Controller
A microprocessor based controller enables the user to operate the unit from the front panel or from a host computer. Analog and RS232 interfaces are provided. Interface Connections
Download HVT1.5K Manual (Preliminary as of 7/05) Home |
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Systems Inc.
This website has been revised as of 03.25.07
Any technical specification described on this website is subject to change without prior notice.
Thank you for visiting the Manitou Systems, Inc. website. Our privacy policy is simple: we collect no personal information about you unless you choose to provide that information to us. We do not give, share, sell or transfer any personal information to a third party.
All Rights Reserved 2007, Manitou Systems, Inc. 18 Commerce Road, Newtown, CT. 06470 |
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