MICROWAVE GENERATORS AND COMPONENTS

Microwave Power Systems for Plasma and 

Industrial Heating Applications

Applications

• PECVD — Deposition of thin films

• Chamber cleaning — Pre-conditioning and soft etch cleaning of plasma process chambers

• Flat Panel Display — Plasma processing of wide panels in cleaning, etching, and depositing of films used in TFT displays

• Coating enhancements — These sources may also be used in conjunction with sputter deposition sources to enable tighter process control and enhanced reactive film properties.

• Diamond deposition — In conjunction with specialized high pressure processing equipment, the Series MW can be used to grow diamond like films.

• Food and Chemical Processing — Microwave power can be used to provide active heating and drying of food, pharmaceutical and chemicals.

• Rubber Vulcanizing — Microwave energy is used to cure rubber based products on high speed in line process systems

• Vacuum Drying — Food products, herbs, and fibers may be processed and dried with microwave heating.

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