Manitou Systems Inc.

SERIES MTK MANUAL MATCHING NETWORKS

Series MTK manual impedance matching network provides an economical

approach for use with small area sputtering sources or, for RF substrate bias

applications. Forced air cooling and air variable capacitors with fixed (tapped)

inductors are used to set the proper matching circuit. Custom & OEM models

are also available to operate with VHF frequencies and higher RF power levels.

All models will operate with any type of RF generator (50 ohm output) as long as the matching circuit is properly configured to match the plasma discharge load. Standard MTK products (with air gap variable capacitors) are designed to operate with RF generators up to 600 watts at frequencies from 13.56 to 40 MHz.

The MTK also includes an internal DC bias probe that enables active measurement of the developed DC bias potential on a parallel plate electrode or conductive sputtering target. The low level DC voltage output is designed to drive a user's high impedance digital volt meter or connect directly to the Manitou Model PB3 digital or Helius RF generator products. Select the proper interface cable for this application.

Models that operate with frequencies from 40 > 125MHz are available upon special request. Please contact the factory.

Model MTK Specifications

RF power rating: 600 Watts
Input impedance: 50 ohms resistive
Operating frequency: 13 to 40 MHz
Cooling: forced air
Input connector: type N female
Output connector: type HN Female
Output impedance: wide range (based on internal series inductor tap setting and selection of shunt capacitor value(s))
AC mains: The unit comes with a remote, wall mount DC power pack rated at 24V DC/400 MA output and 110V AC 50/60 HZ input. The user may also choose to supply their own 24V DC power source.
DC bias output: DB 25 female connector - Calibrated for 0>2VDC output = 0>2000VDC electrode potential input.

Note: VHF (above 40MHz) models are designed with internal matching components - capacitor & inductors - that have different values than low frequency models. Each model type will only operate within the designed frequency range, however the capacitor and inductor valves supplied with the unit may need to be additionally optimized by the user to properly match the plasma load. The 40 to 125 MHz models include a field replaceable series inductor kit. These VHF models are required to be located as close as possible to the plasma electrode ~6" maximum distance.

Input Coaxial Connection cables (RF Generator > MTK)

300 watts maximum power:
- P/N 00000559 N-Male > BNC-Male, 12’ long, RG58 cable.
  - This cable can be used with our Model PB3 digital RF generator.
- P/N 00003962 N-Male > N-Male, 12’ long, RG58 cable.
  - This cable can be used with any RF generator that has an N-Female output connector.

600 watts maximum power:
- P/N 04-130041-08 N-Male > N-Male, 12’ long, RG213 cable.
  - This cable can be used with our Model Helius and any RF generator that has an N-Female output connector.

Control/Signal Connection cables for use with Manitou RF Generators

DC bias signal cable PB3 Digital > MTK:
- P/N 00003960 10' long, shielded cable.
DC bias signal cable Helius > MTK:
- P/N 00003961 10' long, shielded cable.

Output Coaxial Connection cables (MTK > Plasma Load)

Click this link to go to the Cables Accessory page

MODEL	SERIES INDUCTOR	PART NUMBER	INPUT/OUTPUT CONNECTIONS
Please consult the factory for information on all accessories such as coaxial cables and output switches.
MTK^TM Manual Impedance Matching Networks
MTK600-13-L	Tapped	00003873	NF –HNF
MTK600-13-PI	Tapped	00003963	NF –HNF

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Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

This website has been revised as of 03.25.07

Any technical specification described on this website is subject to change without prior notice.

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