HELIUS^TM Series HVT High Power RF GENERATORS

RF Generator General Specifications

• Unless specified in the Manitou part # column, a specific OEM part number will be assigned once the product’s parameters are defined.
• Contact Manitou for information regarding compliance to other global electrical and safety standards and the product’s operation with your process application.

Helius Series General Specifications

Unless otherwise specified, the RF output impedance is 50 ohms resistive and will require the use of an additional application specific impedance matching device to ensure proper and safe operation powering typical plasma processes. This family of products typically operates within a narrow frequency band, which is defined as +/- 2% of the ordered center frequency. The center frequency is fixed and is NOT field-adjustable. 

Helius VHF Series RF Generators 

The Helius VHF series of RF generators typically covers both ISM and other industry specific frequencies. These products may be ordered with user specified output frequencies. Contact Manitou for additional information.

The Helius HVT series are typically used for high power applications. Their hybrid design (solid state driver/ vacuum tube final amplifier) is designed to drive CO² laser cutting and welding systems and very high power plasma processes including sputtering, CVD and etching.

Helius VT series General Specifications

All models are constructed in a stand-alone electronics rack enclosure. These high power RF generators are also available with AC Mains input voltages other than 208 VAC upon special order. Specify AC Mains frequency at the time of order placement.

Click here to view & download a (PDF) catalog of images. (PDF 2000KB)

Click here to view & download typical installation documentation 

(PDF 316KB)

Click here to view & download typical microprocessor control screens &0 documentation (PDF 105KB)

Click here to view & download the remote RF Head rendering 

(PDF 1143KB)

RF GENERATORS

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Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

This website has been revised as of 03.25.07

Any technical specification described on this website is subject to change without prior notice.

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