Manitou Systems Inc.

Passive RF power splitters

These modules are used to equally split the 50 ohm output of an RF generator to simultaneously drive multiple matching networks/plasma loads in a single vacuum chamber. This is effective when two sputtering cathodes are used to coat two sides of a substrate or in a linear fashion on a single side for better uniformity.

This design provides a zero phase shift power signal at it's outputs. Phase shifting of the outputs can be achieved using different length connection cables between each output and load. Any power imbalance (caused by mis-matched loads) is internally absorbed and is dissipated as heat.

Although the power split is typically measured to be an equal amount between ouput ports, this value can be adjusted using a fixed power attenuator. These modules are designed to have an equal number of outputs - for example, 2 or 4 or 6.

All passive power splitter products are custom designed for the user's application. Please contact a Manitou engineer for more information.

Accessory	Notes	Order #
13.56 MHz 1.2 kW Four (4) Output	7/16 DINFemale Input / 4 X HNFemale Output 110VAC cooling fan 50 Ohm Isolated I/Os	.
13.56 MHz 2.5 kW Six (6) Output	7/16 DINFemale Input / 6 X HNFemale Output 110VAC cooling fan 50 Ohm Isolated I/Os	.
80 MHz 600 watt Two (2) Output	NFemale Input / 2 X NFemale Output 110VAC cooling fan 50 Ohm Isolated I/Os	03-130050-10

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Manitou Systems Inc.
33 Ball Pond Road, Danbury, CT. 06810
Tel.203.733.2110 Fax.203.746.1459

This website has been revised as of 12.13.09

Any technical specification described on this website is subject to change without prior notice.

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