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Instructions for configuring your own Delta Glow 

plasma source component set

Model DG300 Plasma Source + RF Generator + Impedance matching network + Match control cable + RF interconnect cable + RF output cable (to plasma source)

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This tutorial is designed to enable the purchaser to design and purchase the proper Model DG300 plasma source system component set. Refer to each component's data sheet or web page for detailed product information. 

The Model DG300 system is comprised of the major components listed below. Each component can be purchased separately or as a package. Click here to view popular packages: DG300 Packages

Model DG300 Plasma Source

The DG300 plasma source is available with a Quartz or Alumina process tube. 

  • The quartz tube - GE Type 214 - is offered for most non-fluorine based processes. 

  • The alumina tube - AL2O3 99.9% - is used where long lifetime (High MTBF) is required and when processing fluorine containing gas.

The DG300 is manufactured with o-ring seals in four places; at each end of the process tube and on the gas feed and source to chamber KF50 centering rings. The DG300 can be furnished with either Viton or Kalrex (Compound #4079) 

  • Viton is offered for most non-fluorine based processes. 

  • Kalrez is used where long lifetime (High MTBF) is required and when processing fluorine containing gas.

RF Power Generator

Manitou Systems offers the full featured Helius or the budget priced Model PB3 RF generator to power the DG300 source. Both 13.56MHz models use the same high quality RF power and control circuits and include an external control / metering interface. AC mains input voltage is 187 > 240 VAC 50/60 Hz.

  • The Helius includes a graphical LCD display, user process parameter pre-sets, and supports the use of the Accu-Match automatic matching network. External control of all functions is available via an Analog or RS232 protocol.

  • The PB3 is a basic RF power generator incorporating LED displays and an Analog external user control. (This image shows a typical Model PB3 with the matching controls on the left side removed and blanked off.)

Matching Network

Impedance matching between the RF power generator and the DG300 is required for optimal performance. The high Q (resonant) characteristic of the DG300 enable easy plasma starting under most processing conditions eliminating the need for a higher cost automatic matching network.

The Model MTK  Model MTK600-13-PI-7/16 manually operated matching network typically complements the DG300 and will easily mate with either the Helius or PB3 RF generators.

The Accu-Match Model  ACM600-13-PI-7/16 automatic impedance matching network will provide fully automatic impedance matching operation from plasma ignition and during the process run. Its controls originate from the Helius RF generator and therefore is offered only with the Helius.  

Cables

The DG300 system will require the use of the following cables: 

  • RF Coaxial interconnect cable -  This cable is a high quality 50 ohm coaxial cable (Type RG8/213 600 watts & RG58 300 watts) and is used to connect the output of the RF generator to the input of the impedance  matching network. It is supplied in a 12 foot (1/4 wavelength) length for proper matching.

  • RF output cable - This cable is a Teflon insulated cable, double shielded with silver plated conductors for low loss and high current carrying capability. It connects the output of the impedance matching network to the DG300. Two lengths, 18" & 24" are available.

  • Match Control Cable - This interconnect cable is used only with the Accu-Match + Helius RF power delivery system. It connects the Accu-Match control / display functions to the Helius.

First (1), please select the desired DG300 model;

  • DG300 with Quartz process tube + Viton o-ring seals            PN 05-100000-00

  • DG300 with Quartz process tube + Kalrez o-ring seals          PN 05-100000-02

  • DG300 with Alumina process tube + Kalrez o-ring seals        PN 05-100000-01

Second (2), please select the desired RF power generator and output power level;

  • PB3-300D         300 watts RF output    PN 04-140032-01

  • Helius H30013   300 watts RF output    PN 00800190

  • Helius H60013   600 watts RF output    PN 00001183

Third (3), please select the desired impedance matching network model;

  • MTK600-13-PI-HN    for use with PB3 & Helius                       PN 00003386

  • ACM600-13-PI-7/16  for use with Helius **                              PN 00001533

Fourth (4), please select the Match Control Cable interconnect cable (** for use with ACM600 only);

  • DB25 Cable - Male to Male, 10' long,                                      PN 00001638

Fifth (5), please select the RF Coaxial interconnect cable (between the RF gen. output & match input);

  • RF coaxial cable - For use with PB3-300D - 12' long RG58 N-M>BNC-M         PN 00002175

  • RF coaxial cable - For use with Helius models - 12' long RG213 N-M>N-M      PN 04-130041-08

Sixth (6), please select the RF output cable (from the impedance match output to DG300). 

  • 18" long - For use with MTK match - 7/16-M>HN-M                   PN 15-700122-02

  • 24" long - For use with MTK match - 7/16-M>HN-M                   PN 00002458

  • 18" long - For use with Accu-Match - 7/16-M>7/16-M                PN 00003517

  • 24" long - For use with Accu-Match - 7/16-M>7/16-M                PN 15-700122-34

If you would like to order a popular DG300 Package, including all necessary components, please click here: DG300 Packages

Replacement parts

  • Process tube kit - Includes a process tube, 2 O-rings & fasteners

    • Alumina tube & Kalrez O-rings            PN 00001736

    • Quartz tube & Kalrez O-rings              PN 00001737

    • Quartz tube & Viton O-rings                PN 05-100000-50

  • Process tube (seperate)

    • Alumina                                            PN 00001729

    • Quartz                                              PN 05-000010-26

  • O-ring seals

    • Viton - for process tube                      PN 00-617001-70

    • Viton - for KF50 centering ring            PN 00003527

    • Kalrez - for process tube                    PN 00001730

    • Kalrez - for KF50 centering ring           PN 00001738

  • Tool kit - Includes various long handle Allen wrenches used in maintenance operations -          PN 00001734

Call to speak with a Manitou engineer about your application, or send us an e-mail at sales@manitousys.com. We’ll help you select the right model for your application.

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33 Ball Pond Road, Danbury, CT. 06810
Tel.203.733.2110 Fax.203.746.1459

 

This website has been revised as of 12.13.09

 

Any technical specification described on this website is subject to change without prior notice.

 

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