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DELTA
GLOW™ RF PLASMA SOURCES
General Specifications
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Gas
Conversion Efficiency
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>90%
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Source
Circuit Topology
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RF
resonant cavity, inductively coupled
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RF
Power Control
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Forward
power leveling
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Impedance
Matching Variable
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Manual operation
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Source
Cluster Operation
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Via passive
RF power splitter module
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Operating
Pressure Range
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1
micron to 10 Torr
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Delta Glow Model Specifications
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Specification
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DG-80
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|
RF input power
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up to 500 Watts
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Operating
frequency
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80 MHz
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Cooling
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forced air
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Reactor
tube dimensions
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20 mm
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Gas
input
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1/4" VCR
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Vacuum
interface
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NW 80 claw or
NW 80 bolt flange
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Model
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Process Tube Type
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Operating Frequency
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Order #
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DG-80
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Quartz
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80 MHz
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DG-80
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Alumina
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80 MHz
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Model DG-80 Accessories
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Accessory
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Order #
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Series PB-3/80 300W 80 MHz RF generator
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Helius H60080VHF 600 watt 80 MHz RF
generator
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RF cable — Model RF2-NN 12 foot
long — connects the RF generator to the matching network
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20mm quartz process tube
replacement kit
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20mm alumina process tube
replacement kit
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RF Plasma Sources | RF
Plasma Power Supplies
Manitou
Systems Inc.
33 Ball Pond Road,
Danbury, CT. 06810
Tel.203.733.2110 Fax.203.746.1459
This
website has been revised as of 12.13.09
Any
technical specification described on this website is subject to change without
prior notice.
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