HELIUS^TM RF GENERATORS

RF Generator General Specifications

• Solid state models are 50/60 Hz AC Mains compatible.
• All models include an Accu-Match remote control interface.
• All models include AC line cords without connectors on the user interface end. Specify custom lengths, if required, at time of order placement.
• Unless specified in the Manitou part # column, a specific OEM part number will be assigned once the product’s parameters are defined.
• All Helius models are equipped with a common exciter I/O connector. All other models may include an exciter I/O as an option. Please specify at time of order placement.
• All models are CE marked. Contact Manitou for information regarding compliance to other global electrical and safety standards and the product’s operation with your process application.

Helius Series Generators  

The Helius series of RF generators feature a conservatively rated power conversion technology. Front end switching technology ensures excellent conversion efficiency and high-reliability housed in a compact unit.

Helius Series 
The Helius line of RF Generators offers both ruggedness and extremely high efficiency. These RF generators are designed for the most demanding plasma processes such as semiconductor, flat panel display, magnetic media, scientific research, and industrial laser applications. The Helius Series of RF power generators are available in three different types:

• Fixed Frequency RF Generators
• 13.56 MHz Frequency Agile  — These frequency agile RF Generators change frequency electronically which dramatically reduces tuning time and enables ultra thin films to be deposited uniformly from run-to-run, significantly increasing process repeatability.
• 13.56 MHz Helius-OEM  — This new series of RF generators is designed for integration into OEM systems that require multiple units with a compact form factor. Manitou has packaged its industry proven Helius RF power technology in a shoebox style unit for maximum performance in a compact, cost-effective package. The Helius-OEM is designed without a costly control panel to allow increased packing density and lower pricing than conventional 19" rack mount designs. In addition, the unit’s compact size enables mounting of multiple RF generators close to the process chamber.

Helius Series General Specifications
All models are housed in a 19" wide rack mount chassis, except for the Helius-OEM 13.56 MHz model, which is designed in a compact form factor. Unless otherwise specified, the RF output impedance is 50 ohms resistive and will require the use of an additional application specific impedance matching device to ensure proper and safe operation powering typical plasma processes. This family of products typically operates within a narrow frequency band, which is defined as +/- 2% of the ordered center frequency. The center frequency is fixed and is NOT field-adjustable. Frequency agile operation is not available on operating frequencies at or above the 27 MHz band.

Series Helius VT RF Generators 

The Helius VT series are typically used for high power applications. Their hybrid design (solid state driver/ vacuum tube final amplifier) is designed to drive CO² laser cutting and welding systems and very high power plasma processes including sputtering and etching.

Helius VT series General Specifications
All models are constructed in a stand-alone electronics rack enclosure. These high power RF generators are also available with AC Mains input voltages other than 208 VAC upon special order. Specify AC Mains frequency at the time of order placement.

RF GENERATORS

Home | Company | News | Contact | Download
RF Plasma Sources | RF Plasma Power Supplies

Manitou Systems Inc.
33 Ball Pond Road, Danbury, CT. 06810
Tel.203.733.2110 Fax.203.746.1459

This website has been revised as of 12.13.09

Any technical specification described on this website is subject to change without prior notice.

Thank you for visiting the Manitou Systems, Inc. website. Our privacy policy is simple: we collect no personal information about you unless you choose to provide that information to us. We do not give, share, sell or transfer any personal information to a third party. 

All Rights Reserved 2009, Manitou Systems, Inc.