Manitou Systems Inc.

Common exciter Modules

A common exciter is used when two or more RF generator/match systems are used to power multiple plasma loads in a single vacuum chamber. The module ensures that each generator produces a signal at the same frequency. This module does NOT correct for phase differences between the generators. Different types of generators require either sine or square wave signals. Contact the factory for additional information.

Accessory	Notes	Order #
CEX Common Exciter	Available to drive 2, 4, 6 and 10 RF generators. May be ordered with phase control.	Consult factory

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Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

This website has been revised as of 03.25.07

Any technical specification described on this website is subject to change without prior notice.

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