Matrixx ^TM  RF & DC Output Switch Modules

Product Description

Matrixx switch modules are used to switch the output of RF power generators, DC sputtering power supplies or impedance matching networks. Different models are designed for DC power switching only and others will accommodate both  RF + DC power. All models are powered with an external 24VDC voltage. This provides a cost effective approach in most R&D environments. Standard models are available with 2, 3 and 4 outputs using industry standard RF connectors (Types 7/16, N, HN, UHF & BNC). Special versions using Multi-Contact type plugs & sockets are available upon request.

Basic models enable switching of a single RF or DC input between multiple outputs. DC only models use high quality open frame relays while RF/DC models use vacuum relays. (Please note that some low power applications can utilize open frame relays - consult the factory for more information.)

Combined models enable both RF and DC power systems to be connected to the switch module and switched between multiple outputs. The RF and DC power systems may be operated simultaneously into two of the multiple outputs. The DC input utilizes an RF blocking filter to keep any conducted RF from interfering with the operation of the DC power system.

All switch modules can also be directly connected (and powered) by a user's PLC or computer control I/O. A type DB-15 male connector is mounted on the enclosure's side surface and is used to connect the control voltages.

These switching modules are not interlocked and therefore the user will need to ensure that the relays are NOT hot switched as extreme damage to the relays will occur. This type of damage will NOT be covered under warranty. 

Physical Mounting

The switch module enclosure measures approximately 8" long X 4.5" wide X 5.5" deep and is typically mounted directly to the matching network’s female RF output connector with a mating male connector (on the switch module). The user is advised to fabricate and install a bracket that fastens to the module's 10-32 threaded PEM mounting points and a rigid surface. 

We can furnish mating connectors for most manufacturer's matching network products. Manitou can also supply a connector kit to enable easy retrofitting of an existing matching network output.

Click here to download a drawing of the switch module.

Complementary Control Panel

The complementary (universal) control panel measures 19" wide X 2RU (1.75") tall and is designed to be mounted in any standard 19" electronics rack cabinet. A front panel mounted switch enables the user to select the desired output.  A "wall wart" type 24VDC power supply (90>250VAC 50/60Hz input) is included to power the control panel + switch module. The user can also elect to not use the wall wart and supply power for the control panel from any other external + 24VDC, 400mA power source. The  wall wart power supply also includes popular international AC mains connectors.  A 10 foot long high quality shielded control cable is typically furnished with each control panel. 

All control panels are sold as a separate line item. Please review the module list below for the suggested panel.

Complementary Output cables

Complementary coaxial output cables are available for connection to all types of sputtering sources and plasma loads. Please review the technical information below and contact the factory or your local sales office to discuss your specific application. Have available descriptions on all connector types that you are (or plan to) use in your system.

RF Applications

• A single matching network output may be switched between 2, 3 or 4 plasma (reactive) loads. 
• A single RF generator output (50 ohms) may be switched between multiple impedance matching network inputs.
• The un-powered outputs typically remain in a floating (un-grounded) state. 
• These RF rated switch modules can also be used to switch HV DC power.

Click here to download a schematic of switch module PN 15-800002-63

DC Applications

• A single DC sputtering (HV) power supply may be switched between 2, 3 or 4 plasma loads. 
• The un-powered outputs typically remain in a floating (un-grounded) state unless specified.
• All DC rated switch modules cannot be used in an RF power application. 

Combined RF & DC applications

• A single matching network output and a single DC sputtering power supply output are connected to the switch module and may be switched between 2, 3 or 4 plasma (reactive) loads. Note: only two plasma loads may be powered at one time with RF applied to one and DC to the other. 
• The DC input incorporates a two element RF blocking filter to keep any conducted RF from interfering with the operation of the DC power system.

Click here to download a schematic of switch module PN 00001134

Connector type tutorial

The Matrixx switch modules can be furnished with almost any type of industry standard connector. Each connector type has its own RF and DC ratings. Typical specifications are available from the connector manufacturer. Below, please find maximum RMS and DC voltage ratings for the most popular connectors.  

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The Matrixx  models listed below represent typical configurations. Contact the factory or your local sales representative for more information regarding your specific application.

      Four parallel output switch module	        Two parallel output switch module mounted 

     Three parallel output switch module                           Three output switch module

Technical Considerations

• Switch module to sputtering gun cable lengths

We suggest that you use a maximum length cable of 36”. This length will limit the amount of lost RF power (as heat) and maximize the power transfer to the sputtering source. If the physical fit-up between the module and the cathodes is tight, you may consider using special 90 degree coaxial transitions. The typical cable lengths are 18”, 24” or 36”. please verify the length and coax connector type on the sputtering source end (the module end uses a type HN connector). Please consult a Manitou engineer for additional information and quotation. 

• Coaxial cable types

Manitou Systems offers high quality Teflon insulated coaxial cables and connectors to connect the sputtering sources to the switch module. Type RG-393 is used in most applications up to 1kW of RF power. Type RG-400 may be used in applications where the power level is below 100 watts. 

Please contact the factory to discuss the proper coaxial cables for your application.

• Dual cable feeds

Dual output connections are defined as parallel connected connectors. This type of output is used when dual or parallel coaxial cables are used to connect a single sputtering gun to the switching module. This approach is used to accommodate high power / high current loads. 

• Matching of different RF sputter cathode impedances

Each user will require a somewhat different RF matching configuration based on cable lengths, target materials and overall process conditions. A typical single cathode/matching network combination is optimized to match just the connected cathode. If the user changes target materials (for example, sputtering a metal and then changing to a dielectric) then the matching network may require adjustment of the series inductor (changing the tap setting) or in some cases the addition of fixed shunt capacitance. The user should always refer to the owner's manual for specific information relating to setting up the match. 

When multiple sputtering cathodes are switched, the component value settings described above may also need to be automatically switched. This can be automated using special RF rated relays. It may also be possible to select fixed settings that will enable multiple plasma load impedance values to be matched without any changes.

 

Please consult the factory for more information on your specific application. Manitou Systems stocks many of the necessary components. 

Click here to download a Data Sheet

The images shown above are representative of standard and application-specific products manufactured by Manitou Systems and may not be exactly representative of the delivered product. We will furnish exact images and /or drawings upon request.

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Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

This website has been revised as of 03.25.07

Any technical specification described on this website is subject to change without prior notice.

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