Manitou Systems Inc.

Delta Glow Applications Worksheet

This applications worksheet is designed to provide us with a better understanding of how the Delta Glow Plasma source will be used to enhance your vacuum system and process performance.

Please print this form, fill out the appropriate fields, and submit this form via fax to 203.270.8786 and our engineers will make a recommendation on the proper Delta Glow model and RF power system.

Customer Data:
Company Name

Contact Name

Street Address

Mail Stop

City

State Zip Code

Country

Email Address

Telephone Number

FAX Number

Application or Problem to be solved:? Reactive sputtering

Testing of gaseous lamps

Atomic oxygen generation

Exhaust gas abatement

R&D studies

Water vapor contamination of deposited thin films

Substrate degassing in load lock chamber ?

Cleaning of newly manufactured vacuum chambers

Polymer material surface enhancements

PECVD

Other application

Vacuum chamber size:

Length

Width

Thickness

Physical size constraints:

Length

Diameter of footprint

Vacuum pumping system:

Mechanical CFM

Diffusion type

Turbo
LPS

Substrate size:??

Length

Width

Thickness

Type (material)

Vacuum interface:?

KF50

NW80

Conflat

UHV compatibility

Other

Process gas restrictions:?

Oxygen compatible pumping and exhaust?
Fluorine compatible pumping and exhaust?

Corrosive gases

Other

Additional Notes and Comments: (Please describe your application in detail).

Manitou Systems Inc.
18 Commerce Road, Newtown, CT. 06470
Tel.203.270.8797 Fax.203.270.8786

This website has been revised as of 03.25.07

Any technical specification described on this website is subject to change without prior notice.

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